|
|
|
|
 |
|
|
Pemtron
Color 3D Profiling(WSI)
ECLIPSE LV100-3DP/
LV-150-3DP
3D 정밀 측정 정밀검사
|
|
|
 기존에 사용하고 계신 Nikon Eclipse LV100 및 LV150 모델에 3D 측정 기능이 추가
장착 가능합니다.
초보자도 쉽고 빠르게 3D 측정을 할 수 있는 사용 편의성을 보장합니다.
가장 빠른 3D 측정 시간을 보장합니다. (최고 1초 이내 3D Data 획득)
다양한 측정 기능을 제공 합니다.
(Profile, Height, Roughness, Critical dimension 등)
적용 분야 : LCD, OLED, Wafer, Mems, Bump 등
|
 |
 |
|
 주요 사양
|
|
|
|
Model
|
ECLIPSE
LV100-3DP |
|
Meauring
Method
|
Microscope and 3D
profiler(WSI)
|
|
Objectives
Lens option
|
Interferometic
: 2.5x, 5x, 10x, 20x, 50x Motorized
5Position Turret / Objectives : User selectable
|
|
Field-of-View
|
Depend on Objectives
|
|
Episcopic illuminator/ LV-U EPI
|
12V-50W
high-intensity halogen lamp / Field and aperture diaphragms synchronized with
B/D changeover
|
|
Scanning Range
|
200[um]
|
|
Scanning
Velocity
|
40[um/sec]
|
|
Vertical
Resolution
|
up to 0.1[nm]
|
|
Camera
Resolution
|
640 x 480(1024 x 768
: optional)
|
|
Frame Rate
|
up to 500Hz
|
|
Lateral
Resolution
|
Depend on Objectives
|
|
Step Heigt
Repeatability
|
<0.5%(1σ) dependent on the various parameters
|
|
Auto Function
|
Auto Focusing(within
200um), Auto 3D-measurement
|
|
Focusing
section
|
Coaxialcoarse/fine focys knob, left : coarse/fine,
right : fine ;Stroke 30mm, coarse 14.0mm/rotation :
finefocusing 0.1mm/rotation(1mm/increments)
|
|
Nosepiece
|
C-N6 Nosepiece, L-NU5
|
|
Eyepiece tube
|
LV-TI3 Trinocylar
(erect image, F.O.V. 22/25)
|
|
Eyepiece
|
CFI eyepiece series
|
|
Electrostatic
decay time
|
1000-10V, within
0.2sec
|
|
Stage
|
LV-S32 3x2 Stage
(stroke : 75x50 mm including glass plate)
|
|
Software
|
ViolinView,
ViolinMap, Windows XP
|
|
Dimension
|
250(W) x 60(D) x
660(H)
|
|
Weight
|
Approx. 11.2kg
|
|
|
| |
|
|
 |
|
 |
|
| |
|
 |
|
|
